Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The magnetization measurement on the nanometer scale was discussed. The magnetic tip of a magnetic force microscope within the point-probe approximation was calibrated. The calibration was proved for determining quantitatively a hysteresis loop for the single magnetic dot with perpendicular magnetic anisotropy.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B