PublicationChemistry of MaterialsPaperLow-Temperature Chemical Vapor Deposition of High-Purity Copper from an Organometallic SourceChemistry of MaterialsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 May 2002PublicationChemistry of MaterialsAuthorsDavid B. BeachFrancoise K. LeGouesChao-Kun HuIBM-affiliated at time of publicationTopicsPhysical SciencesShare
