Low-Temperature Chemical Vapor Deposition of High-Purity Copper from an Organometallic Source

Paper

01 May 2002

Abstract

No abstract available.

Conference paper

S. Cohen, J.C. Liu, et al.

MRS Spring Meeting 1999

Paper

Thomas H. Baum, Carl E. Larson, et al.

Journal of Organometallic Chemistry

Paper

Michiel Sprik

Journal of Physics Condensed Matter

Paper

Sharee J. McNab, Richard J. Blaikie

Materials Research Society Symposium - Proceedings