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Nuclear Instruments and Methods
Paper

Low energy ion bombardment during crystal growth and its effect on structure, composition and physical properties

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Abstract

Low energy ion bombardment during nucleation and film growth of inorganic and organic materials leads to unusual structures and compositions. Systematic control of the film growth processes can be accomplished with beams or in a plasma environment and can lead to systematic control of any physical property which critically depends on small changes in structure. Examples are cited. © 1981.

Date

01 Jan 1981

Publication

Nuclear Instruments and Methods

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