Tunnel FETs (TFETs) have been identified as the most promising steep slope devices for ultralow power logic circuits. In this paper, we demonstrate in-plane InAs/Si TFETs monolithically integrated on Si, using our recently developed template-assisted selective epitaxy approach. These devices represent some of the most scaled TFETs with dimensions of less than 30 nm, combined with excellent aggregate performance with average subthreshold swing (SS), of around 70 mV/decade combined with ION of a few μA/μm for /VDS/= /VGS/ = 0.5 V. Here, we will discuss the device fabrication as well as the experimental electrical data. Extensive low temperature characterization and activation energy analysis is used to gain insights into the factors limiting device performance. Combined with the simulation study presented in part 2 of this paper, this will elucidate how traps are ultimately limiting the SS.