Closing the gap between self-assembly and microsystems using self-assembly, transfer, and integration of particles

Abstract

Controlled adhesion that enabled a microfabrication-compatible process to integrate particles on unstructured substrates through successive self-assembly, transfer, and integration (SATI) was described. Self-assembly arranges the particles on a dedicated, reusable template without fixing them. A parallel pick-and-place approach was used to transfer the ordered particles from the template to the target substrate. All steps of SATI process were found compatible with very small particles and could transfer proteins from one surface to another. The method have been demonstrated for isotropic and anisotropic crystals of 50 nm at high resolution and adhesion approaches.