PaperDesign and Experimental Technology for 0.1-μm Gate-Length Low-Temperature Operation FET'sGeorge A. Sai-Halasz, Matthew R. Wordeman, et al.IEEE Electron Device Letters
Conference paperAn experimental high-density memory array fabricated with electron beamH.N. Yu, R.H. Dennard, et al.ISSCC 1973
PaperScanning x-ray microscope with 75-nm resolutionH. Rarback, D. Shu, et al.Review of Scientific Instruments
Paper1 µm MOSFET VLSI Technology: Part VI― Electron-Beam LithographyWarren D. Grobman, Hans E. Luhn, et al.IEEE JSSC
