Publication
IITC/MAM 2015
Conference paper

Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates

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Abstract

The influence of Ni thickness on the formation of Nickel suicides was systematically investigated between 0 and 15nm. Annealing thickness gradients distinguishes Alms that agglomerate (>5nm) and films that are morphologically stable (<5nm). Alloying the initial Ni layer influences this critical thickness to higher (Al, Co) and lower (Ge, Pd, Pt) values. Pole figures and in situ XRD provides information to understand this observed shift in critical thickness.

Date

10 Nov 2015

Publication

IITC/MAM 2015

Authors

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