Optimizing ULK film properties to enable BEOL integration with TDDB reliability
- E. T. Ryan
- Deepika Priyadarshini
- et al.
- 2015
- IITC/MAM 2015
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Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates
- F.A. Geenen
- K. Van Stiphout
- et al.
- 2015
- IITC/MAM 2015