William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Directed self-assembly of cylinder forming block copolymer (c-BCP) thin films via a dynamic thermal field on multidimensional symmetric graphoepitaxy channels is reported. A synergy of dynamic thermal and static boundary fields induces highly aligned c-BCP cylinders inside the channels with a power law dependence of orientational order parameter f, on trench width, f ∼ d -0.3, analogous to dual-field alignment of semiconducting metals and liquid crystals on graphoepitaxy surfaces, f′ ∼ d-1. Static thermal annealing of identical films in a vacuum oven for several days fails to produce comparable results. Furthermore, we demonstrate global c-BCP cylinder alignment over mesas and trenches by tuning the synergy between the dynamic thermal field and asymmetry of the graphoepitaxy static field. © 2013 American Chemical Society.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films