Fan Jing Meng, Ying Huang, et al.
ICEBE 2007
Paper
High-numerical-aperture optical designs
Abstract
This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.
Related
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Conference paper
QALD-3: Multilingual question answering over linked data
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013
Nanda Kambhatla
ACL 2004