High-numerical-aperture optical designs

Rama N. Singh; Alan E. Rosenbluth; G. Chiu; J.S. Wilczynski

doi:10.1147/rd.411.0039

IBM J. Res. Dev

Paper

01 Jan 1997

High-numerical-aperture optical designs

View publication

Abstract

This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.

Conference paper

Enriching the interactive user experience of open document format

John M. Boyer, Charles F. Wiecha

DocEng 2009

Conference paper

Combining lexical, syntactic, and semantic features with maximum entropy models for extracting relations

Nanda Kambhatla

ACL 2004

Conference paper

An analysis of the effects of miss clustering on the cost of a cache miss

Thomas R. Puzak, A. Hartstein, et al.

CF 2007

Conference paper

Soft x-ray diffraction of striated muscle

S.F. Fan, W.B. Yun, et al.

Proceedings of SPIE 1989

View all publications

Abstract

Related

Enriching the interactive user experience of open document format

Combining lexical, syntactic, and semantic features with maximum entropy models for extracting relations

An analysis of the effects of miss clustering on the cost of a cache miss

Soft x-ray diffraction of striated muscle