IFETC 2018
Conference paper

Flexible Piezoresistive Sensors Fabricated by Spalling Technique

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In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of -0.16/°C, which is desirable for targeted health monitoring applications.