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Publication
ASMC 2019
Conference paper
Failure isolation in ring oscillator circuit and defect detection in CMOS technology research
Abstract
Ring oscillators (ROs) are used for yield learning during the research phase of a CMOS technology generation. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.