ASMC 2019
Conference paper

Failure isolation in ring oscillator circuit and defect detection in CMOS technology research

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Ring oscillators (ROs) are used for yield learning during the research phase of a CMOS technology generation. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.