High-throughput, nondestructive assessment of defects in patterned epitaxial films on silicon by machine learning-enabled broadband plasma optical measurements
- Shravan Matham
- C. Durfee
- et al.
- 2019
- ASMC 2019
Conference paper
Publications
3 results at ASMC 2019
Failure isolation in ring oscillator circuit and defect detection in CMOS technology research
- Victor Chan
- M. Bergendahl
- et al.
- 2019
- ASMC 2019
Conference paperEffect of chamber surface coat on TiN film growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2019
- ASMC 2019
Conference paper