Publication
IEEE T-ED
Paper

Evolution of the MOSFET Dynamic RAM—A Personal View

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Abstract

The early conceptual stages and key elements in the development of the one-device MOSFET dynamic RAM are reviewed from the personal perspective of the author. Future miniaturization to the level of 1/4μm channel length and minimum lithography dimension is projected. © 1984 IEEE

Date

01 Jan 1984

Publication

IEEE T-ED

Authors

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