Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution

Abstract

The depth resolution of a nickel-copper interface has been measured as a function of the total depth of analysis using the glow-discharge mass-spectrometric depth-profiling technique. A possible interpretation of the results is that the depth resolution is determined by a 30-Å depth-independent interface broadening plus a broadening which varies between 2 and 8% of the total depth of analysis.