Publication
Journal of Applied Physics
Paper

Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution

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Abstract

The depth resolution of a nickel-copper interface has been measured as a function of the total depth of analysis using the glow-discharge mass-spectrometric depth-profiling technique. A possible interpretation of the results is that the depth resolution is determined by a 30-Å depth-independent interface broadening plus a broadening which varies between 2 and 8% of the total depth of analysis.

Date

02 Sep 2008

Publication

Journal of Applied Physics

Authors

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