K. Keiji Kanazawa, A. Diaz, et al.
Synthetic Metals
Electrical and sputtering characteristics of a 10-cm-diam inverted magnetron configuration have been investigated in the transition region from positive to negative space-charge modes. Radial voltage and ion energy distributions were obtained for both modes. The positive space-charge mode resulted in the most efficient transport of sputtered material from cathode to anode. Dependence of space-charge sign reversal on apparatus dimensions and magnetic field strength are discussed showing that operation in the 10 -5 Torr range can be expected for a 40-cm-diam configuration. The deposition profile at the anode was in good agreement with the calculated profile showing that ion current and hence sputtering is uniform over the effective cathode area. © 1965 The American Institute of Physics.
K. Keiji Kanazawa, A. Diaz, et al.
Synthetic Metals
J.W. Coburn, Eric Kay
Applied Physics Letters
W. Beyer, W.D. Gill, et al.
Solid State Communications
Harold F. Winters, Eric Kay
Journal of Applied Physics