Electron probe microanalysis

Electron probe microanalysis has been reviewed with special emphasis on beam target interactions. Methods for the quantitative interpretation of X-ray data obtained by this technique are discussed and compared. Modifications in the theory are described for the special case of the analysis of surface layers. Associated techniques, such as cathodoluminescence, Kossell diffraction and Auger electron spectroscopy are reviewed. Finally, merits and disadvantages of electron probe microanalysis are compared to other methods of surface analysis. © 1971.