Ahmet S. Ozcan, Mehmet S. Ozcan
Frontiers in Synaptic Neuroscience
Using temperature controlled Si and C ion implantation, we studied the effects of pre-amorphization implantation on NiPt alloy silicide phase formation. In situ synchrotron x-ray diffraction and resistance measurements were used to monitor phase and morphology evolution in silicide films. Results show that substrate amorphization strongly modulate the nucleation of silicide phases, regardless of implant species. However, morphological stability of the thin films is mainly enhanced by C addition, independently of the amorphization depth. © 2013 AIP Publishing LLC.
Ahmet S. Ozcan, Mehmet S. Ozcan
Frontiers in Synaptic Neuroscience
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Microelectronic Engineering
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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JVSTA