Hemanth Jagannathan, Michael Deal, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
We report on the optimization of Co\Pd-multilayer-based reference layers in magnetic tunnel junctions with perpendicular magnetic anisotropy. By inserting a thin Ta-spacer layer between the CoFeB interfacial layer and Co\Pd multilayer, a high tunneling magnetoresistance up to 98.5% can be achieved. Electron energy loss spectroscopy and synchrotron X-ray diffraction studies show that the high magnetoresistance is related primarily to the suppression of Pd diffusion and secondarily to improved CoFeB texture during annealing. © 2010-2012 IEEE.
Hemanth Jagannathan, Michael Deal, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Oun-Ho Park, Joy Y. Cheng, et al.
ACS National Meeting 2007
Ruisheng Liu, See-Hun Yang, et al.
Applied Physics Letters
Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology