Plasma-assisted etching of tungsten films: A quartz-crystal microbalance study
- F. Fracassi
- J.W. Coburn
- 1988
- Journal of Applied Physics
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Effect of ion bombardment on the plasma-assisted etching and deposition of plasma perfluoropolymer thin films
- F. Fracassi
- E. Occhiello
- et al.
- 1987
- Journal of Applied Physics