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Publication
MRS Proceedings 1993
Conference paper
Effect of annealing on the Cu distribution and Al2Cu precipitation in Al(Cu) thin films
Abstract
The Cu distribution in Al(Cu) thin films has been examined in blanked and patterned samples as a function of annealing. The Cu concentration in the Al grains, measured at room temperature, closely follows the solubility at the anneal temperature when a high cooling rate is used from the annealing temperature. With fine lines, the room temperature Cu concentration follows the solubility at the anneal temperature only at low anneal temperatures.