Publication
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Paper

Domain dynamics in epitaxial Pb (Zr0.2Ti0.8)O 3 films studied by piezoelectric force microscopy

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Abstract

Ferroelastic 90° a -domain dynamics in epitaxial Pb (Zr 0.2Ti0.8)O3 (lead zirconium titanate, PZT) films is investigated using lateral and vertical piezoelectric force microscopies. The PZT film consists of out-of-plane polarized c -domains separated by a cross-hatch network of in-plane polarized a -domains. When an electric field is applied across the PZT film, the a -domains are rearranged on the nanoscale. Depending on the direction of the electric field, this results either in larger or more fragmented c -domains. Both lateral and vertical piezoelectric force signals demonstrate the importance of ferroelastic a -domain movement since their dynamics will determine the final polarization retention time and stability of ferroelectric capacitors. © 2010 American Vacuum Society.