William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
J.C. Marinace
JES