J. Photopolym. Sci. Tech.
Paper
27 Oct 2009

Directed self-assembly on sparse chemical patterns for lithographic applications

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Abstract

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Date

27 Oct 2009

Publication

J. Photopolym. Sci. Tech.

Authors

  • Joy Y. Cheng
  • Alshakim Nelson
  • Charles T. Rettner
  • Daniel P. Sanders
  • Alexander Sutherland
  • Jed W. Pitera
  • Young-Hye Na
  • Ho-Cheol Kim
  • William D. Hinsberg
IBM-affiliated at time of publication

Topics

  • Physical Sciences

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