Electrical characterization of FinFETs with fins formed by directed self assembly at 29 nm fin pitch using a self-aligned fin customization scheme
- 2014
- IEDM 2014
Publications
This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
11 results for Joy Y. Cheng
Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- 2015
- SPIE Advanced Lithography 2015
Customization and design of directed self-assembly using hybrid prepatterns
- 2015
- SPIE Advanced Lithography 2015
Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch
- 2015
- SPIE Advanced Lithography 2015
Spatial Control of the Self-assembled Block Copolymer Domain Orientation and Alignment on Photopatterned Surfaces
- 2020
- ACS AMI
Synthesis and thin-film self-assembly of cylinder-forming high- χ block copolymers
- 2016
- J. Photopolym. Sci. Tech.
Interfacial layers with photoswitching surface energy for block copolymer alignment and directed self-assembly
- 2015
- J. Photopolym. Sci. Tech.
Synthesis and characterization of polycarbonate-containing all-organic High-χ block copolymers for directed self-assembly
- 2015
- J. Photopolym. Sci. Tech.
Orientation Control of Block Copolymers Using Surface Active, Phase-Preferential Additives
- 2016
- ACS AMI
Development of polycarbonate-containing block copolymers for thin film self-assembly applications
- 2016
- Polymer Chemistry