Electrical characterization of FinFETs with fins formed by directed self assembly at 29 nm fin pitch using a self-aligned fin customization scheme
- Hsinyu Tsai
- H. Miyazoe
- et al.
- 2014
- IEDM 2014
Publications
This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Featured collections
Popular topics
Year
11 results for Joy Y. Cheng
Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- Eri Hirahara
- Margareta Paunescu
- et al.
- 2015
- SPIE Advanced Lithography 2015
Customization and design of directed self-assembly using hybrid prepatterns
- Joy Y. Cheng
- Gregory S. Doerk
- et al.
- 2015
- SPIE Advanced Lithography 2015
Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch
- Hsinyu Tsai
- H. Miyazoe
- et al.
- 2015
- SPIE Advanced Lithography 2015
Spatial Control of the Self-assembled Block Copolymer Domain Orientation and Alignment on Photopatterned Surfaces
- Ji Yeon Kim
- Philip Liu
- et al.
- 2020
- ACS AMI
Synthesis and thin-film self-assembly of cylinder-forming high- χ block copolymers
- Ankit Vora
- Gabriela Alva
- et al.
- 2016
- J. Photopolym. Sci. Tech.
Interfacial layers with photoswitching surface energy for block copolymer alignment and directed self-assembly
- Michael J. Maher
- Christopher M. Bates
- et al.
- 2015
- J. Photopolym. Sci. Tech.
Synthesis and characterization of polycarbonate-containing all-organic High-χ block copolymers for directed self-assembly
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2015
- J. Photopolym. Sci. Tech.
Orientation Control of Block Copolymers Using Surface Active, Phase-Preferential Additives
- Ankit Vora
- Kristin Schmidt
- et al.
- 2016
- ACS AMI
Development of polycarbonate-containing block copolymers for thin film self-assembly applications
- Ankit Vora
- Rudy J. Wojtecki
- et al.
- 2016
- Polymer Chemistry