PublicationADMETA 2011Conference paperDesigning porous ultra low-κ dielectrics to meet scaling challengesADMETA 2011AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2011PublicationADMETA 2011AuthorsE. Todd RyanSteve GatesAnita MadanDimitri KioussisEric LinigerGriselda BonillaEmil ZinChoong-Un KimUlrich MayerAnita PeevaAlfred GrillIBM-affiliated at time of publicationTopicsPhysical SciencesShare