Anurag Jain, Svetlana Rogojevic, et al.
Journal of Applied Physics
The epitaxial interfaces of Si/Pd2Si, Si/NiSi2, and, to a lesser extent, Si/PtSi have been investigated by transmission electron microscopy using cross-sectional specimens. Direct lattice imaging was used to image the Si/Pd2Si and the Si/NiSi2 interfaces. The Si/Pd2Si interface was found to be rather smooth on a macroscopic scale but rough on a atomic scale, whereas the opposite is true for the Si/NiSi2 interface. A twinning relationship between NiSi2 and {111} Si has been observed. The Si/PtSi interface is very rough on a macroscopic scale. Interface dislocations are present in the Pd- and Ni-silicide cases. No evidence for an amorphous interfacial layer has been obtained.
Anurag Jain, Svetlana Rogojevic, et al.
Journal of Applied Physics
P.S. Ho, K.N. Tu
MRS Bulletin
P.S. Ho, J.E. Lewis, et al.
Surface Science
Jae-Woong Nah, Kai Chen, et al.
ECTC 2007