Conference paper
SOME BASIC PROBLEMS IN VLSI INTERCONNECT.
P.S. Ho
ECS Meeting 1984
A stretch deformation method has been developed for quantitative study of adhesion and deformation of metal/polymer structures. The adhesion energy is directly measured from the difference in the load versus elongation curves between film/substrate and substrate structures. This method has been applied to study structures formed with Cu, Cr, and Cu/Cr deposited on pyromellitic dianhydride-oxydianiline polyimide. The importance of crack formation in the metal layer for initiating interfacial delamination is demonstrated.
P.S. Ho
ECS Meeting 1984
C.-K. Hu, D. Gupta, et al.
VMIC 1984
P.S. Ho
Philosophical Magazine
J.C.M. Hwang, P.S. Ho, et al.
Applied Physics Letters