Publication
IIRW 2013
Conference paper

Constant shape factor frequency modulated charge pumping (FMCP)

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Abstract

We examine the seemingly frequency-dependent gate leakage current component of frequency-modulated charge pumping and show it to be a measurement artifact. If untreated, this results in erroneous defect density extractions. We present a constant shape factor methodology to suppress this component such that frequency-modulated charge pumping is well positioned for advanced device defect characterization. © 2013 IEEE.

Date

Publication

IIRW 2013

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