Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials