PublicationADMETA 2010Conference paperCo capping layers for Cu/low-k interconnectsADMETA 2010AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2010PublicationADMETA 2010AuthorsC.-C. YangP. FlaitzB. LiF. ChenCathryn ChristiansenS.-Y. LeeP. MaD. EdelsteinIBM-affiliated at time of publicationTopicsPhysical SciencesShare