R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
A process for the fabrication of mirror facets for AlGaAs/GaAs laser diodes is described. The major requirements for the fabrication of high quality mirrors have been fulfilled by using Cl2/Ar chemically assisted ion beam etching (CAIBE) and a new multilayer mask structure that produces the smoothest facets. The fabricated AlGaAs/GaAs SQW-GRIN-SCH lasers with etched mirrors show characteristics similar to those of lasers with cleaved mirrors on the same substrate. Results of on-wafer testing of laser threshold uniformity by means of monitor diodes indicate the potential of the process for laser integration and full wafer fabrication and testing. © 1989.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
T.N. Morgan
Semiconductor Science and Technology
Michiel Sprik
Journal of Physics Condensed Matter
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications