Conference paper
Integration of direct plating of Cu onto a CVD Ru liner
S. Malhotra, D. Canaperi, et al.
AMC 2004
Soft-x-ray photoemission measurements of the bulk Si 2p core level in Si/SiO2 overlayer structures show that hot-electron transport in SiO2 is essentially independent of temperature between 300 and 980 K. These results reveal a basic failure of the semiclassical Monte Carlo formalism to correctly model the strong electron-phonon interaction in SiO2 at electron energies >6 eV. The experimental data are shown to be consistent with the trends seen in quantum Monte Carlo transport calculations. © 1992 The American Physical Society.
S. Malhotra, D. Canaperi, et al.
AMC 2004
E. Gusev, C. Cabral Jr., et al.
IEDM 2004
D.A. Lapiano-Smith, E.A. Eklund, et al.
Applied Physics Letters
F.J. Himpsel, F.R. McFeely, et al.
Physical Review B