E. Cartier, F.R. McFeely, et al.
VLSI Technology 2005
Photoemission spectroscopy of spherosiloxane cluster derived Si/SiO x interfaces has allowed the direct assignment of observed spectral features to specific chemical moieties. The implications of these assignments for structural models of the Si/SiO2 interface are explored. Models specifically constructed to be consistent with photoemission data are shown to be incorrect after reanalysis of core-level shifts based on the recently synthesized model systems. A new model for the Si/SiO2 interface is proposed which is consistent with the current understanding of photoemission for Si/SiOx interfaces as well as with results from numerous other experiments.
E. Cartier, F.R. McFeely, et al.
VLSI Technology 2005
C.-C. Yang, D. Edelstein, et al.
IITC 2009
L.J. Whitman, S.A. Joyce, et al.
Vacuum
F.R. McFeely, J.A. Yarmoff, et al.
The Journal of Chemical Physics