Publication
S3S 2017
Conference paper

Advanced FDSOI design: The U-channel device for 7nm node and beyond

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Abstract

Planar ultra-thin body and box (UTBB1-3) fully depleted silicon on insulator (FDSOI) devices have many advantages for future low-cost energy-efficient applications. However, process steps for scaling to ultra-thin FDSOI devices can be difficult to control, and extrinsic resistance can hinder any performance improvement. In this paper, we present a novel planar U-channel UTBB FDSOI device that can alleviate these problems.

Date

07 Mar 2018

Publication

S3S 2017

Authors

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