Publication
SPIE Advanced Lithography 2015
Conference paper

Accurate and fast computation of transmission cross coefficients

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Abstract

Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a Köhler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.

Date

24 Feb 2015

Publication

SPIE Advanced Lithography 2015

Authors

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