B.M. Rush, G.S. Frankel, et al.
JES
It is well known that chemical etching of strontium titanate (SrTiO3) results in titanium-terminated (B site) surfaces. In this letter, we describe a facile method for generating strontium-terminated surfaces in SrTiO3. We demonstrate that a substrate treatment consisting of a low-power oxygen ashing followed by annealing yields a strontium (A site)-terminated surface in single-crystal SrTiO3 (100). This surface termination of the substrate allows the deposition of cuprate films with improved quality. © 2001 American Institute of Physics.
B.M. Rush, G.S. Frankel, et al.
JES
E. Cartier, V. Narayanan, et al.
VLSI Technology 2004
E. Gusev, D.A. Buchanan, et al.
Microelectronic Engineering
J. Misewich, T.F. Heinz, et al.
Physical Review Letters