Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Inequality constrained minimization problems are often solved byconsidering a sequence of parameterized barrier functions. Each barrierfunction is approximately minimized and the relevant parameterssubsequently adjusted.It is common for the estimated solution to one barrier function problemto be used as a starting estimate for the next. However, this hasunfortunate repercussions for the standard Newton-like methods applied tothe barrier subproblem.In this note, we consider a class of alternative Newton methods whichattempt to avoid such difficulties.Such schemes have already proved of use in the Harwell Subroutine Libraryquadratic programming codes {\tt VE14} and {\tt VE19}. © 1994, Springer-Verlag Berlin Heidelberg. All rights reserved.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Matthew A Grayson
Journal of Complexity
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998