1.75-GHz acoustic-surface-wave transducer fabricated by an electron beam

Abstract

Surface-acoustic-wave interdigital transducers operating at 1.75 GHz have been fabricated on y-cut z-oriented LiNbO3 and y-cut x-oriented quartz substrates by electron-beam techniques. The transducers consist of 25 pairs of interleaved aluminum "fingers" 0.3 μ wide and 0.7 μ apart. Used as a surface acoustic wave delay line, the insertion loss has been measured to be as low as 25 dB with a bandwidth of 70 MHz for 2.2-μsec delay. The parameters of the equivalent circuit of the transducer have been measured and agree with the theoretical calculation. © 1969 The American Institute of Physics.