Grating acoustic scanner using bulk acoustic waves

Abstract

A new type of electronically scanned and focused acoustic beam scanner, based on coherent scattering of a grazing incident bulk wave with chirped frequencies by an array of surface grooves, is discussed. Experimental results of a 40 MHz bulk wave grating acoustic scanner with 1″ field of view and 300 μm lateral resolution will be presented as a feasibility demonstration. © 1981, The Institution of Electrical Engineers. All rights reserved.