Localization and quantification of trace-gas fugitive emissions using a portable optical spectrometer
- Eric J. Zhang
- Chu C. Teng
- et al.
- SPIE DCS 2018
Nathan Marchack received his PhD in Chemical Engineering from the University of California, Los Angeles in 2012. His thesis work in Professor Jane Chang's group focused on characterizing and modeling the etching behavior of hafnium lanthanate high-k dielectric films in chlorine-based plasmas.
He subsequently joined the IBM T.J. Watson Research Center in Yorktown Heights, NY as a Research Staff Member in the Advanced Plasma Processing Group. He has since worked in a diverse set of research areas, including: