The Extreme Extendibility of Cu and Post-Cu Dual Damascene BEOL Interconnect Technology
- Daniel Edelstein
- Son Nguyen
- et al.
- 2024
- IEDM 2024
Atharv Jog
Title
BEOL Integration Engineer
Top collaborators
DM
Dominik Metzler
Advisory Engineer, BEOL RIE
NL
Nick Lanzillo
Research Staff Member
HH
Huai Huang
BEOL Reliability, Quality and Characterization