Ultra-thin Body and BOX (UTBB) device for aggressive scaling of CMOS technology
- Q. Liu
- A. Yagishita
- et al.
- 2011
- CSTIC 2011
Conference paper
Publications
4 results at CSTIC 2011
Opportunities and challenges of FinFET as a device structure candidate for 14nm node CMOS technology
- Tenko Yamashita
- Veeraraghvan S. Basker
- et al.
- 2011
- CSTIC 2011
Conference paperLeakage engineering enabling PDSOI ring oscillators operating in sub-100pA/μm Ioff regime
- Zhibin Ren
- Jin Cai
- et al.
- 2011
- CSTIC 2011
Conference paperPlasma etch challenges for porous low k materials for 32nm and beyond
- Catherine Labelle
- R. Srivastava
- et al.
- 2011
- CSTIC 2011
Conference paper