Material and process improvements towards sub 36nm pitch EUV single exposure
- Karen Petrillo
- Dave Hetzer
- et al.
- 2019
- ANTS 2019
Conference paper
Publications
3 results at ANTS 2019
A Materials Screening Methodology for Scaled Non-Volatile Memory in the AI Era
- Nicholas A. Lanzillo
- R. R. Robison
- 2019
- ANTS 2019
Conference paperImpact of heater configuration on Reset characteristics of PCM Mushroom cell
- Anirban Chandra
- Phil Oldiges
- et al.
- 2019
- ANTS 2019
Conference paper