Laser annealing in CMOS manufacturing
- Oleg Gluschenkov
- H. Jagannathan
- 2018
- ECS Meeting 2018
Conference paper
Publications
4 results at ECS Meeting 2018
Towards InGaAs MSDRAM capacitor-less cells
- Carlos Navarro
- Santiago Navarro
- et al.
- 2018
- ECS Meeting 2018
Conference paperUV Assisted Densification of PerHydroPoIySilazane (PHPS) based Spin-On glass in High Aspect Ratio Gap Fill Structure
- S. Mehta
- H. Sheng
- et al.
- 2018
- ECS Meeting 2018
Conference paperComplementary III-V heterojunction tunnel FETs monolithically integrated on silicon
- Clarissa Convertino
- Heinz Schmid
- et al.
- 2018
- ECS Meeting 2018
Conference paper