Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
509 results at JES
On the Nature of Fixed Oxide Charge
- S.I. Raider
- A. Berman
- 2019
- JES
Selective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- S. Zirinsky
- E.A. Irene
- 2019
- JES
An Explanation of the Electrochromism of Lutetium Diphthalocyanine
- G.A. Corker
- B. Grant
- et al.
- 2019
- JES
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
On the Role of Buffers and Anions in NiFe Electrodeposition
- Jean Horkans
- 2019
- JES
Etching Silicon with Fluorine Gas
- M. Chen
- V.J. Minkiewicz
- et al.
- 2019
- JES
Preparation and Characterization of Ruthenium Dioxide Crystals
- M.W. Shafer
- R.A. Figat
- et al.
- 2019
- JES
Effects of Oxidation on the Atmospheric Corrosion of Permalloy Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES