Publications

509 results at JES

Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Paper
Silicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- - E.A. Irene
  - D.W. Dong
- 2019
- JES
Paper
Silicon Oxidation Studies: Measurement of the Diffusion of Oxidant in SiO₂ Films
- - E.A. Irene
- 2019
- JES
Paper
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Paper
I. Interaction of Al Films with O₂ at Low Pressures
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
Paper
The Anodic Sectioning of Beryllium
- - M.T. Shehata
  - Roger Kelly
  - et al.
- 2019
- JES
Paper
Preparation and Electrical Properties of V₂O₃ Single Crystals of Controlled Stoichiometry
- - S.A. Shivashankar
  - R. Aragón
  - et al.
- 2019
- JES
Paper
Selective Studies of Chemical Vapor-Deposited Aluminum Nitride-Silicon Nitride Mixture Films
- - S. Zirinsky
  - E.A. Irene
- 2019
- JES
Paper
Electrochemical Test to Evaluate Passivation Layers: Overcoats of Si in Ink
- - M.H. Lee
  - J.M. Eldridge
  - et al.
- 2019
- JES
Paper
Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- - Ivan Haller
  - Ralph Feder
  - et al.
- 2019
- JES
Paper