Development of KrF hybrid resist for a dual isolation application
- Sen Liu
- Steven Holmes
- et al.
- 2013
- SPIE Advanced Lithography 2013
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3520 results for Mathematical Sciences
Monitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- Bassem Hamieh
- Hyun Chol Choi
- et al.
- 2013
- SPIE Advanced Lithography 2013
Computational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- Chang An Wang
- Chao-Chun Liang
- et al.
- 2013
- SPIE Advanced Lithography 2013
Engineering future light emitting diodes and photovoltaics with inexpensive materials: Integrating ZnO and Si into GaN-based devices
- Can Bayram
- K.-T. Shiu
- et al.
- 2013
- SPIE OPTO 2013
Flexible, stable, and easily processable optical silicones for low loss polymer waveguides
- Brandon W. Swatowski
- Chad M. Amb
- et al.
- 2013
- SPIE OPTO 2013
Direct binary search (DBS) algorithm with constraints
- Kartheek Chandu
- Mikel Stanich
- et al.
- 2013
- CI-DPHA 2013
Polymer-based optical interconnects using nanoimprint lithography
- Arjen Boersma
- Sjoukje Wiegersma
- et al.
- 2013
- SPIE OPTO 2013
Trust and obfuscation
- Murat Sensoy
- Chatschik Bisdikian
- et al.
- 2012
- SPIE Defense + Security 2012