Summary Abstract: Developments in broad-beam ion source technology and applications
- H.R. Kaufman
- J.J. Cuomo
- 1983
- JVSTA
Publications
3525 results for Materials Discovery
Chemical bonding and reactions at Ti/Si and Ti/oxygen/Si interfaces
- R. Blitz
- G.W. Rubloff
- et al.
- 1983
- JVSTA
A He-diffraction investigation of the p(2×2) and c(2×2) phases of oxygen on Ni(100)
- K.H. Rieder
- 1983
- Surface Science
Schottky barrier formation at Pd, Pt, and Ni/Si(111) interfaces
- R.J. Purtell
- G. Hollinger
- et al.
- 1983
- JVSTA
Importance of chain reactions in the plasma deposition of hydrogenated amorphous silicon
- Ivan Haller
- 1983
- JVSTA
Plasma etching of niobium with CF4/O2 gases
- Mao-Min Chen
- Run Han Wang
- 1983
- JVSTA
Patterning of poly-para-xylylenes by reactive ion etching
- J.T.C. Yeh
- K.R. Grebe
- 1983
- JVSTA
Vacuum systems for microelectronics
- John F. O’hanlon
- 1983
- JVSTA
Chemical bonding and Schottky barrier formation at transition metal-silicon interfaces
- Paul S. Ho
- 1983
- JVSTA
Effect of surface chemistry and work function in secondary ion mass spectrometry
- Ming L. Yu
- 1983
- JVSTA