Transient diffusion of boron implanted in SI along random and channeling directions
- W.K. Chu
- M. Numan
- et al.
- 1989
- Nuclear Inst. and Methods in Physics Research, B
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64 results at Nuclear Inst. and Methods in Physics Research, B
Ion implantation in high-Tc superconductors
- A.D. Marwick
- G.J. Clark
- 1989
- Nuclear Inst. and Methods in Physics Research, B
Rapid thermal processing, an integral part of shallow junction formation
- T.O. Sedgwick
- 1989
- Nuclear Inst. and Methods in Physics Research, B
Focused ion beam repair of lithographic masks
- A. Wagner
- J.P. Levin
- 1989
- Nuclear Inst. and Methods in Physics Research, B
X-ray and Raman studies of MeV ion-bombarded GaInAs/GaAs
- Chu R. Wie
- G. Burns
- et al.
- 1989
- Nuclear Inst. and Methods in Physics Research, B
The stopping of ions in compounds
- J.F. Ziegler
- J.M. Manoyan
- 1988
- Nuclear Inst. and Methods in Physics Research, B
Low energy ionization effect of He atoms at surfaces
- Y. Muda
- D.M. Newns
- 1988
- Nuclear Inst. and Methods in Physics Research, B
Radiation effects in thin films of high Tc superconductors
- G.J. Clark
- A.D. Marwick
- et al.
- 1988
- Nuclear Inst. and Methods in Physics Research, B
Reconsidering the mechanisms of laser sputtering with Knudsen-layer formation taken into account
- Roger Kelly
- R.W. Dreyfus
- 1988
- Nuclear Inst. and Methods in Physics Research, B
The role of energetic ion bombardment in silicon-fluorine chemistry
- J.W. Coburn
- H.F. Winters
- 1987
- Nuclear Inst. and Methods in Physics Research, B