High mobility channels for ultimate CMOS
- D.K. Sadana
- S.J. Koester
- et al.
- 2006
- ECS Meeting 2006
Conference paper
Publications
15 results at ECS Meeting 2006
Comparison of electromigration in Cu interconnects with ALD or PVD TaN liners
- C.-K. Hu
- L. Gignac
- et al.
- 2006
- ECS Meeting 2006
Conference paperInfluence of alloying elements on the formation and stability of NiSi
- C. Detavernier
- D. Deduytsche
- et al.
- 2006
- ECS Meeting 2006
Conference paperChemical-mechanical polishing of SiCOH-based low-k dielectrics
- Wei-Tsu Tseng
- Akihisa Sakamoto
- et al.
- 2006
- ECS Meeting 2006
Conference paperGold electrodeposition on silicon
- Q. Huang
- H. Deligianni
- et al.
- 2006
- ECS Meeting 2006
Conference paper