Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- Juliano Borges
- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
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3520 results for Mathematical Sciences
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- Yinjie Cen
- Emad Aqad
- et al.
- 2024
- SPIE Advanced Lithography 2024
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- P. Labeaume
- K. Hernandez
- et al.
- 2024
- SPIE Advanced Lithography 2024
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- Benjamin D. Rafael-Naab
- Jong Keun Park
- et al.
- 2024
- SPIE Advanced Lithography 2024
Novel spin-on overcoat materials for EUV photoresist enhancement
- Xisen Hou
- Yinjie Cen
- et al.
- 2024
- SPIE Advanced Lithography 2024
Advanced EUV CAR small molecule compounds design and its impact to etch performance
- Yinjie Cen
- Jong Keun Park
- et al.
- 2024
- SPIE Advanced Lithography 2024
Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
- Jayoung Koo
- YunJi Kim
- et al.
- 2024
- SPIE Advanced Lithography 2024
Reflectance Mode Fluorescence Optical Tomography with Consumer-Grade Cameras
- Mykhaylo Zayats
- Christopher Hansen
- et al.
- 2023
- MICCAI 2023
Solving Sparse Linear Systems via Flexible GMRES with In-Memory Analog Preconditioning
- Vasileios Kalantzis
- Mark Squillante
- et al.
- 2023
- HPEC 2023
A Rigorous Risk-aware Linear Approach to Extended Markov Ratio Decision Processes with Embedded Learning
- Alexander Zadorojniy
- Takayuki Osogami
- et al.
- 2023
- IJCAI 2023